• Frontiers of Optoelectronics
  • Vol. 3, Issue 2, 194 (2010)
Lei WANG1, Yiwen ZHANG1, Fei QIU1, Ning ZHOU2, Dingli WANG2, Zhimou XU1, Yanli ZHAO1, Yonglin YU1, and Wen LIU1、2、*
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Accelink Technologies Co. Ltd., Wuhan 430074, China
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    DOI: 10.1007/s12200-010-0005-0 Cite this Article
    Lei WANG, Yiwen ZHANG, Fei QIU, Ning ZHOU, Dingli WANG, Zhimou XU, Yanli ZHAO, Yonglin YU, Wen LIU. DFB LD manufactured by nanoimprint lithography[J]. Frontiers of Optoelectronics, 2010, 3(2): 194 Copy Citation Text show less

    Abstract

    Gratings of distributed feedback laser diodes (DFB LDs) have been successfully manufactured by nanoimprint lithography (NIL). Uniform gratings with periods of about 240 nm and phase-shifted in the center have been fabricated by a soft press NIL employing a polymer stamp technology. Moreover, the shape of the grating is rectangle, rather than sinusoidal by holography. The test results show good characteristics of the electrical and spectral output. The results of this study indicate that NIL has high potential for the manufacture of DFB LDs.
    Lei WANG, Yiwen ZHANG, Fei QIU, Ning ZHOU, Dingli WANG, Zhimou XU, Yanli ZHAO, Yonglin YU, Wen LIU. DFB LD manufactured by nanoimprint lithography[J]. Frontiers of Optoelectronics, 2010, 3(2): 194
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