• Optics and Precision Engineering
  • Vol. 14, Issue 1, 121 (2006)
1,2, 2, 2, 2, and 2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Optics and Precision Engineering, 2006, 14(1): 121 Copy Citation Text show less
    References

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    [9] ROY S,FURUKAWA S,MECHREGANY M.Determination of Young's modulus and residual stress of electroless nickel using test structures fabrication in a new surface micromachining process[J].Microsystem Technologies,1996(2):92-96.

    [10] WILLIAM T.Electrostatic comb drive for resonant sensor and actuator applications[D].University of California,1990:42-65.

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    [1] YAO Feng-lin, GAO Shi-qiao. Dynamic test of vibration for micro machined gyroscope based on high speed photography[J]. Optics and Precision Engineering, 2012, 20(1): 165

    [2] ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled z-axis micromachined gyroscope[J]. Optics and Precision Engineering, 2011, 19(9): 2123

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Optics and Precision Engineering, 2006, 14(1): 121
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