[7] LI L,UTTAMCHANDANI D.Design and evaluation of a MEMS optical chopper for fibre optical applications measurement technology[J].MEMS and Microsystems Engineering,2004,151(2):77-83.
[9] ROY S,FURUKAWA S,MECHREGANY M.Determination of Young's modulus and residual stress of electroless nickel using test structures fabrication in a new surface micromachining process[J].Microsystem Technologies,1996(2):92-96.
[10] WILLIAM T.Electrostatic comb drive for resonant sensor and actuator applications[D].University of California,1990:42-65.