• Acta Physica Sinica
  • Vol. 68, Issue 11, 118101-1 (2019)
Qi-Hai Lu1、4, Xiao-Li Tang2、*, Yu-Zhe Song1, Xian-Wei Zuo1, Gen-Liang Han1, Peng-Xun Yan3, and Wei-Min Liu4
Author Affiliations
  • 1Key Laboratory of Sensor and Sensing Technology of Gansu Province, Institute of Sensor Technology, Gansu Academy of Sciences, Lanzhou 730000, China
  • 2State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 3Institute of Nano-materials Application Technology, Gansu Academy of Sciences, Lanzhou 730000, China
  • 4Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
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    DOI: 10.7498/aps.68.20182195 Cite this Article
    Qi-Hai Lu, Xiao-Li Tang, Yu-Zhe Song, Xian-Wei Zuo, Gen-Liang Han, Peng-Xun Yan, Wei-Min Liu. Thermal analysis on crystal phase synthesis of iron nitride film and its magnetic properties[J]. Acta Physica Sinica, 2019, 68(11): 118101-1 Copy Citation Text show less
    Phase diagram of Fe-N system[24].Fe-N体系相图[24]
    Fig. 1. Phase diagram of Fe-N system[24]. Fe-N体系相图[24]
    AFM spectrum of the iron nitride film obtained by sputtering.溅射得到的氮化铁薄膜的AFM图谱
    Fig. 2. AFM spectrum of the iron nitride film obtained by sputtering.溅射得到的氮化铁薄膜的AFM图谱
    XRD patterns of iron nitride films before and after annealing at different temperatures for 2 hours.不同温度退火2 h前后的氮化铁薄膜的XRD图谱
    Fig. 3. XRD patterns of iron nitride films before and after annealing at different temperatures for 2 hours.不同温度退火2 h前后的氮化铁薄膜的XRD图谱
    XRD pattern of iron nitride films with different annealing time at 430 ℃[29].430 ℃退火不同时间的氮化铁薄膜的XRD图谱[29]
    Fig. 4. XRD pattern of iron nitride films with different annealing time at 430 ℃[29]. 430 ℃退火不同时间的氮化铁薄膜的XRD图谱[29]
    TG-DSC curves of iron nitride film (dotted line is DTG, which is the first derivative of TG).氮化铁薄膜的TG-DSC曲线(虚线为DTG, 是TG的一阶导数)
    Fig. 5. TG-DSC curves of iron nitride film (dotted line is DTG, which is the first derivative of TG).氮化铁薄膜的TG-DSC曲线(虚线为DTG, 是TG的一阶导数)
    In-plane VSM pattern of iron nitride films.氮化铁薄膜的面内VSM图谱
    Fig. 6. In-plane VSM pattern of iron nitride films.氮化铁薄膜的面内VSM图谱
    In-plane & out-of-plane VSM pattern of the γ'-Fe4N filmγ'-Fe4N薄膜的面内和面外VSM图谱
    Fig. 7. In-plane & out-of-plane VSM pattern of the γ'-Fe4N film γ'-Fe4N薄膜的面内和面外VSM图谱
    温度/℃化学组分主要晶相晶型
    330FeN1.1γ''-FeN 立方
    415Fe2N1.3ξ-Fe2N 六角
    490Fe3N1.4ε-Fe3N 六角
    510Fe3N1.3ε-Fe3N 六角
    562Fe4N γ'-Fe4N 立方 (Fe构成面心立方, N位于体心)
    590Fe4N0.7γ'-Fe4N 立方
    636Fe4N0.37γ-Fe 面心立方
    690Feα-Fe 体心立方
    Table 1. Chemical composition, main crystal phase, and crystal form of the Fe-N at key nodes of the TG-DSC curve.
    Qi-Hai Lu, Xiao-Li Tang, Yu-Zhe Song, Xian-Wei Zuo, Gen-Liang Han, Peng-Xun Yan, Wei-Min Liu. Thermal analysis on crystal phase synthesis of iron nitride film and its magnetic properties[J]. Acta Physica Sinica, 2019, 68(11): 118101-1
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