Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry

Yilang Ruan; Dahai Li; Linzhi Yu; Xinwei Zhang; Xiangtian Xiao

doi:10.3788/CJL202249.2104003

Journals >Chinese Journal of Lasers >Volume 49 >Issue 21 >Page 2104003 > Article

Chinese Journal of Lasers
Vol. 49, Issue 21, 2104003 (2022)

Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry

Yilang Ruan¹, Dahai Li^1、2、*, Linzhi Yu¹, Xinwei Zhang¹, and Xiangtian Xiao¹

Author Affiliations

¹College of Electronics and Information Engineering, Sichuan University, Chengdu 610065, Sichuan, China

²School of Aeronautics and Astronautics, Sichuan University, Chengdu 610065, Sichuan, China

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DOI: 10.3788/CJL202249.2104003 Cite this Article Set citation alerts

Yilang Ruan, Dahai Li, Linzhi Yu, Xinwei Zhang, Xiangtian Xiao. Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry[J]. Chinese Journal of Lasers, 2022, 49(21): 2104003 Copy Citation Text

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Fig. 1. Geometry diagram of off-axis wave aberration

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Fig. 2. Model of reversed optical path for off-axis wave aberration

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Fig. 3. Off-axis point wave aberration measurement system based on PMD

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Fig. 4. Forward wave aberrations, reversed wave aberrations and their differences of plano-convex lens at different fileds. (a)－(c) 0° half field angle; (d)－(f) 3° half field angle; (g)－(i) 5° half field angle

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Fig. 5. Zernike coefficient comparison between wave aberration and reversed wave aberration of plano-convex lens at 5° half field angle

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Fig. 6. Coefficients of primary coma and astigmatism of plano-convex lens under different conditions. (a) Different field angles with aperture of 75 mm; (b) different apertures with field angle of 5°

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Fig. 7. Experimental devices. (a) Diagram of measuring device; (b) plano-convex lens to be measured

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Fig. 8. Acquired fringe patterns. (a) Fringes with lens; (b) fringes without lens

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Fig. 9. Transmission fringe images under different fields of view

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Fig. 10. Experimental and simulated wave aberrations after removing first four terms of Zernike polynomials. (a)－(c) 0° half field angle; (d)－(f) 3° half field angle; (g)－(i) 5° half field angle

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Fig. 11. Experimental and simulated results at 5.17° half field angle

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Fig. 12. Coefficients of primary coma and astigmatism of plano-convex lens under different conditions. (a) Different field angles with aperture of 60 mm; (b) different apertures with field angle of 5.17°

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Aberration	0°	3°	5°
Forward wave aberration	RMS of 1311.1 nm，PV of 4403.2 nm	RMS of 2946.6 nm，PV of 12140.9 nm	RMS of 5944.6 nm，PV of 27002.8 nm
Reversed wave aberration	RMS of 1303.9 nm，PV of 4377.4 nm	RMS of 2946.1 nm，PV of 13248.7 nm	RMS of 5958.7 nm，PV of 27436.0 nm
Difference	RMS of 7.3 nm，PV of 25.8 nm	RMS of 43.2 nm，PV of 281.1 nm	RMS of 144.6 nm，PV of 949.1 nm

Table 1. RMS and PV values of forward and reversed wave aberrations at different field angles

Result	0°	2.88°	5.17°
PMD result	RMS of 168.6 nm，PV of 721.2 nm	RMS of 500.5 nm，PV of 2605.9 nm	RMS of 1580.3 nm，PV of 8201.8 nm
Simulated result	RMS of 160.9 nm，PV of 540.8 nm	RMS of 530.5 nm，PV of 2811.1 nm	RMS of 1613.9 nm，PV of 8418.7 nm
Difference	RMS of 36.3 nm，PV of 253.7 nm	RMS of 61.1 nm，PV of 373.1 nm	RMS of 82.4 nm，PV of 479.1 nm

Table 2. RMS and PV values of PMD and simulated results at different field angles

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