Researching

Journals
  • Advanced Photonics
  • Photonics Insights
  • Advanced Photonics Nexus
  • Photonics Research
  • Advanced Imaging
  • View All Journals
  • Chinese Optics Letters
  • High Power Laser Science and Engineering
    • Articles
  • Optics
  • Physics
  • Geography
  • View All Subjects
    • Conferences
  • CIOP
  • HPLSE
  • AP
  • View All Events
    • News
    About CLP
    Search by keywords or author
    Journals >Optical Instruments >Volume 43 >Issue 1 >Page 42 > Article
    • Optical Instruments
    • Vol. 43, Issue 1, 42 (2021)
    Design of microscope optical system for panel inspection
    Lu CHEN and Zhiqiang LI*
    Author Affiliations
  • Skyverse Limited, Shenzhen 518000, China
    • show less
    DOI: 10.3969/j.issn.1005-5630.2021.01.007 Cite this Article
    Lu CHEN, Zhiqiang LI. Design of microscope optical system for panel inspection[J]. Optical Instruments, 2021, 43(1): 42 Copy Citation Text show less
    References
    Abstract
    Get PDF(in Chinese)
    Figures&Tables (14)
    Equations (3)
    References (0)
    Get Citation
    Copy Citation Text
    Lu CHEN, Zhiqiang LI. Design of microscope optical system for panel inspection[J]. Optical Instruments, 2021, 43(1): 42
    Download Citation
    Tools
    Share
    Save the article for my favorites
    Paper Information
    Recommended Topics
    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology