Qiangxian HUANG, Baolin CHENG, Chibin ZHANG, Fan ZHANG, Liansheng ZHANG. Development of 6-DOF micro-driving stage with sub-nano driving resolution[J]. Optics and Precision Engineering, 2023, 31(13): 1933

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- Optics and Precision Engineering
- Vol. 31, Issue 13, 1933 (2023)
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