Development of five-DOF integrated stage with nano-precision positioning

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Collection Of theses on high power laser and plasma physics >Volume 3 >Issue 1 >Page 80 > Article

Collection Of theses on high power laser and plasma physics
Vol. 3, Issue 1, 80 (2005)

Development of five-DOF integrated stage with nano-precision positioning

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Development of five-DOF integrated stage with nano-precision positioning[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 80 Copy Citation Text

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Abstract

This paper presents a new type of nanopositioning stage which has five degree of freedom; the stage is driven by piezoelectric actuators and guided by compliant hinges. The stage can be fabricated with an integrated metal through wire electro discharge machining and is compact. The equation of compliant mechanisms and a design case is also presented in this paper.

Keywords

Compliant mechanism Piezo-driven mechanism Precision positioning

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