• Acta Photonica Sinica
  • Vol. 47, Issue 6, 614003 (2018)
ZHANG Jun-zhan1、*, ZHANG Yuan-min1, LIU Yong-sheng2, ZHANG Ying1, and LIU Qian3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    DOI: 10.3788/gzxb20184706.0614003 Cite this Article
    ZHANG Jun-zhan, ZHANG Yuan-min, LIU Yong-sheng, ZHANG Ying, LIU Qian. Femtosecond Laser Ablation Properties of ZrO2 and Al2O3 Ceramics at Linear and Circular Polarized Light[J]. Acta Photonica Sinica, 2018, 47(6): 614003 Copy Citation Text show less
    References

    [1] ZHANG Jun-zhan, WANG Yu-qian, ZHANG Ying, et al. Effect of feeding speed on micro-hole drilling in TiC ceramic by femtosecond laser[J]. Optics and Precision Engineering, 2015, 23(6): 1565-1571.

    [2] JIANG Tao. Research on ultrashort laser texturing of fuctionality micro-structured surfaces[D]. Harbin: Harbin Institute of Technology, 2012: 1-4.

    [3] XIAO Rong-shi, ZHANG Huan-zhen, HUANG Ting. Recent progress in femtosecond pulsed laser processing research[J]. Journal of Mechanical Engineering, 2016, 52(17): 176-186

    [4] XIA Bo, JIANG Lan, WANG Su-mei,et al. Femtosecond laser drilling of micro-holes[J]. Chinese Journal of Lasers, 2013, 40(2): 1-12.

    [5] SERBIN J, OVSIANIKOV A, CHICHKOV B. Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties[J]. Optics Express, 2004, 12(21): 5221.

    [6] GITTARD S D, NARAYAN R J. Laser direct writing of micro- and nano-scale medical devices[J]. Expert Review of Medical Devices, 2010, 7(3): 343-356.

    [7] LI Chen, CHENG Guang-hua. Linearly, radially and azimuthally polarized femtosecond laser induced periodic surface structures on amorphous alloy[J]. Acta Photonica Sinica, 2016, 45(8): 0832001.

    [8] ZHAO Quan-zhong, MALZER S, WANG Li-jun. Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses[J]. Optics Letters, 2007, 32(13): 1932.

    [9] REIF J, VARLAMOVA O, COSTACHE F. Femtosecond laser induced nanostructure formation: self-organization control parameters[J]. Applied Physics A, 2008, 92(4): 1019-1024.

    [10] ZHANG Cheng-yun, MAN Wen-qing, JIE Hai, et al. Study on micro-nano structure and wetting characteristics of Al2O3 ceramic induced by femtosecond laser[J]. Journal of Guangzhou University (Natural Science Edition), 2017,(4): 22-26.

    [11] RAN Ling-ling, GUO Zhong-yi, QU Shi-liang. Self-organized periodic surface structures on ZnO induced by femtosecond laser[J]. Applied Physics A, 2010, 100(2): 517-521.

    [12] DUFFT D, ROSENFELD A, DAS S K, et al. Femtosecond laser-induced periodic surface structures revisited: A comparative study on ZnO[J]. Journal of Applied Physics, 2009, 105(3): 3688.

    [13] REIF J, VARLAMOVA O, UHLIG S, et al. On the physics of self-organized nanostructure formation upon femtosecond laser ablation[J]. Applied Physics A, 2014, 117(1): 179-184.

    [14] WANG Lei,CHEN Qi-dai, CAO Xiao-wen, et al. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing[J]. Light Science & Applications, 2017, 6(12): e17112.

    [15] ZHONG Min-jian, GUO Guang-lei, YANG Jun-yi, et al. Femtosecond pulse laser-induced self-organized nanostructures on the surface of ZnO crystal[J]. Chinese Physics B, 2007, 89(3): 707-709.

    [16] WANG Lei,XU Bin-bin,CAO Xiao-wen, et al. Competition between subwavelength and deep-subwavelength structures ablated by ultrashort laser pulses[J]. Optica, 2017, 4(6): 637-642.

    [17] LIU Yi, BRELET Y, HE Zhan-bing, et al. Laser-induced periodic annular surface structures on fused silica surface[J]. Applied Physics Letters, 2013, 102(25): 3688.

    [18] WU Dong-jiang, YAO Long-jiang, MA Guang-yi, et al. Influence of polarization state on the surface quality of quartz glass processed by femtosecond laser[J]. High Power Laser and Particle Beams, 2014, 26(2): 31-37.

    [19] KIM S H, SOHN I B, JEONG S. Parallel ripple formation during femtosecond laser grooving of ceramic[J]. Applied Physics A, 2011, 103(4): 1053-1057.

    [20] TEMNOV V V, SOKOLOWSKI T K, ZHOU P, et al. Multiphoton ionization in dielectrics: Competition of circular and linear polarization[J]. Physical Review Letters, 2006, 97(23): 237403.

    [21] ZHANG Tian-yu, KONG Bin, CHEN Min-sun, et al. Anti-laser performance test of aluminum alloy plates reinforced by ceramic coating[J].Infrared and Laser Engineering, 2017, 46(6): 0606002.

    [22] MANICONE P F, ROSSI I P, RAFFAELLI L. An overview of zirconia ceramics: basic properties and clinical applications[J]. Journal of Dentistry, 2007, 35(11): 819-826.

    [23] PERRIE W, RUSHTON A, GILL M, et al. Characterization of ultrafast microstructuring of alumina (Al2O3)[C]. SPIE, 2005, 5714: 43-52.

    [24] XIN Jian-ting, TAN Fang, LUO Guo-qiang, et al. Ablation effect of multi pulse femtosecond laser on germanium materials[J]. High Power Laser and Particle Beams, 2011, 23(7): 1753-1757.

    [25] ZHAO Qing-liang, JIANG Tao, DONG Zhi-wei, et al. Ablation threshold and material removal mechanisms of SiC processed by femtosecond laser[J]. Journal of Mechanical Engineering, 2010, 46(21): 173-177.

    [26] LONZAGA J B, AVANESYAN S M, LANGFORD S C, et al. Color center formation in soda-lime glass with femtosecond laser pulses[J]. Journal of Applied Physics, 2003, 94(7): 4332-4340.

    [27] DAS D K, MCDONALD J P, YALISOVE S M, et al. Femtosecond pulsed laser damage characteristics of 7% Y2O3 -ZrO2 thermal barrier coating[J]. Applied Physics A, 2008, 91(3): 421-428.

    [28] GMEZ D, GOENAGA I. On the incubation effect on two thermoplastics when irradiated with ultrashort laser pulses: Broadening effects when machining microchannels[J]. Applied Surface Science, 2006, 253(4): 2230-2236.

    [29] BULGAKOVA N M, STOIAN R, ROSENFELD A, et al. A general continuum approach to describe fast electronic transport in pulsed laser irradiated materials: The problem of Coulomb explosion[J]. Applied Physics A, 2005, 81(2): 345-356.

    [30] DU D, LIU X, MOUROU G. Reduction of multi-photon ionization in dielectrics due to collisions[J]. Applied Physics B, 1996, 63(6): 617-621.

    [31] JOGLEKAR A P, LIU H, SPOONER G J, et al. A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining[J]. Applied Physics B, 2003, 77(1): 25-30.

    [32] HEIROTH S, KOCH J, LIPPERT T, et al. Laser ablation characteristics of yttria-doped zirconia in the nanosecond and femtosecond regimes[J]. Journal of Applied Physics, 2010, 107(1): 1527.

    [33] LI Xiao-xi, JIA Tian-qing, FENG Dong-hai, et al. Ablation mechanism of alumina under ultrashort pulsed laser irradiation[J]. Chinese Journal of Physics, 2004, 53(7): 2154-2158.

    [34] BEATA Z, NIKITA M, VICTOR T, et al. Time-resolved observation of band-gap shrinking and electron-lattice thermalization within X-ray excited gallium arsenide[J]. Scientific Reports, 2015, 5(3): 1304-1310.

    [35] HIRAO K, MIURA K, SAKAKURA M, et al. Heating and rapid cooling of bulk glass after photoexcitation by a focused femtosecond laser pulse[J]. Optics Express, 2007, 15(25): 16800.

    [36] KIM S H, SOHN I B, JEONG S. Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining[J]. Applied Surface Science, 2009, 255(24): 9717-9720.

    [37] VANTHANH K, YUNCAN M, JINHAI S. Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching[J]. Applied Surface Science, 2014. 289: 529-532.

    [38] ZHANG Cheng-yun, YAO Jiang-wu, LAN Sheng, et al. Effects of plasma confinement on the femtosecond laser ablation of silicon[J]. Optics Communications, 2013, 308(11): 54-63.

    CLP Journals

    [1] Yangjin LI, Xian FAN, Guanfu LONG, Nanfeng ZHANG, Yanxi ZHANG, Deyong YOU, Xiangdong GAO. Spatter Dynamic Recognition and Feature Analysis During High-power Disk Laser Welding[J]. Acta Photonica Sinica, 2021, 50(2): 208

    ZHANG Jun-zhan, ZHANG Yuan-min, LIU Yong-sheng, ZHANG Ying, LIU Qian. Femtosecond Laser Ablation Properties of ZrO2 and Al2O3 Ceramics at Linear and Circular Polarized Light[J]. Acta Photonica Sinica, 2018, 47(6): 614003
    Download Citation