Author Affiliations
Center for Terahertz Waves, School of Precision Instrument and Opto-Electronics Engineering, Key Laboratory of Optoelectronic Information Technology, Ministry of Education, Tianjin University, Tianjin 300072, Chinashow less
Fig. 1. Flowchart of the automated design of guided mode resonance filters
Fig. 2. Schematic diagram of the silicon grating under normal incidence. (a) Schematic diagram of cross section; (b) top view of the grating
Fig. 3. Transmission and electromagnetic field distributions of silicon grating. (a) Transmission of silicon grating calculated by CST under TE polarization; (b) transmission of silicon grating calculated by CST under TM polarization; (c) transmission of silicon grating calculated by RCWA under TE polarization; (d) transmission of silicon grating calculated by RCWA under TM polarization; (e) electric field distribution of Fig. 3(a) at 0.6522 THz; (f) magnetic field distribution of Fig. 3(a) at 0.6522 THz
Fig. 4. Schematic and design result of the metasurface grating. (a) Three-dimensional view; (b) square cell structure; (c) transmission distribution between 0.55 THz and 0.65 THz; (d) cross section electric field distribution at 0.6 THz
Fig. 5. Photographs of silicon grating sample. (a) Photograph of silicon grating; (b) SEM of the central sample
Fig. 6. 8F terahertz time domain spectroscopy system. (a) Terahertz beam path diagram; (b) picture of experimental facility
Fig. 7. Measurement results of the central sample of silicon grating. (a) Time domain THz signal; (b) its corresponding amplitude spectrum; (c) comparison between simulation results (dot line) and experimental results (solid line)
Fig. 8. Influence of size error on the resonance frequency. (a) Influence of horizontal error; (b) influence of depth error
Fig. 9. Spectra of the silicon grating at 0°, 4°, and 8° incident angles. (a) Simulation result; (b) experimental results
Method | Polarization | h1 /μm | h2 /μm | p /μm | f | fd /THz | fn /THz |
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RCWA | TE | 126 | 174 | 165 | 0.32 | 0.6514 | 0.6502 | RCWA | TM | 50 | 250 | 200 | 0.48 | 0.6442 | 0.6655 | CST | TE | 118 | 182 | 162 | 0.32 | 0.6522 | 0.6512 | CST | TM | 85 | 215 | 139 | 0.50 | 0.6533 | 0.6559 |
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Table 1. Parameters and resonance frequencies of the gratings optimized by CST and RCWA