[1] Liu Zhongyao, Yan Juqun, Zhang Rui, et al.. A system for measurement of line width by combining polarization interferometry with confocal microscopy［J］. Acta Metrologica Sinica, 2005, 26(2): 115-119.

[2] Xu D J, Takis K. Detection and localization of edge contours[C]. SPIE, 2003, 5097: 79-89.

[3] Jiang Li, Wu Weiren, Zhang Zhijing, et al.. Automatic detection of micro image edges for micro accessories［J］. Optics and Precision Engineering, 2013, 21(1): 224-231.

[4] Wu Ligang, Li Zupan, Wang Xunsi, et al.. Internal macroscopic defects perspective imaging detection system for infrared chalcogenide glasses［J］. Chinese J Lasers, 2012, 39(1): 0108001.

[5] Yin C Y, Lin D J, Liu Z Y, et al.. New advance in confocal microscopy［J］. Meas Sci & Technol, 2006, 17(3): 596-600.

[6] Wang Zhao, Zhu Shengcheng, Tan Yushan, et al.. Parallel confocal measurement though integrated optical fiber bundle plate［J］. Chinese J Lasers, 2005, 32(1): 105-109.

[7] Yan Juqun, Liu Zhongyao, Lin Dejiao, et al.. Method of heterodyne confocal microscopy measuring big step height［J］. Chinese J Lasers, 2005, 32(3): 389-393.

[8] Zhang Man, Tang Zhilie, Tan Zhiliang, et al.. New method of spatial differential imaging with confocal microscope［J］. Acta Optica Sinica, 2012, 32(3): 0318001.

[9] Tu Long, Yu Jin, Fan Zhongwei, et al.. Research on the technology of parallel laser confocal microscopy detection based on digital micromirror device［J］. Laser & Optoelectronics Progress, 2013, 50(10): 101702.

[10] Taehoon K, Taejoong K, Seungwoo L, et al.. Optimum conditions for high-quality 3D reconstruction in confocal scanning microscopy［C］. SPIE, 2006, 6090: 181-187.

[11] Yu Qing, Yu Xiaofen, Cui Changcai. Design of laser parallel confocal measurement system with single source and dual beam paths［J］. Optics and Precision Engineering, 2013, 21(2): 281-286.

[12] Wang Y F, Kuang C F, Xiu P, et al.. A lateral differential confocal microscopy for accurate detection and localization of edge contours［J］. Opt & Lasers in Eng, 2014, 53: 12-18.

[13] Zhao W Q, Tan J B, Qiu L R. Bipolar absolute differential confocal approach to higher spatial resolution［J］. Opt Express, 2004, 12(21): 5013-5021.

[14] Zhao W Q, Tan J B, Qiu L R, et al.. SABCMS, a new approach to higher lateral resolution of laser probe measurement system［J］. Sensors and Actuators A, 2005, 120(1): 17-25.

[15] Zhao W Q, Tan J B, Qiu L R. Tri-heterodyne confocal microscope with axial superresolution and higher SNR［J］. Opt Express, 2004, 12(21): 5191-5197.

[16] Shigeharu K, Tony W. Effect of axial pinhole displacement in confocal microscopes［J］. Appl Opt, 1993, 32(13): 2257-2261.

[17] Wilson T. Confocal Microscopy［M］. London: Academic Press, 1990. 1-64.

[18] Gu M. Three-Dimensional Imaging in Confocal Microscopes［M］. Singapore: World Scientific Publishing Co Pte Ltd, 1996. 51.