[2] JUNG W, PETER Y A, CARR E, et al.. Single-crystal-silicon continuous membrane deformable mirror array for adaptive optics in space-based telescopes ［J］. IEEE Journal of Selected Topics in Quantum Electronics, 2007,13(2): 162-167.
[3] WANG X L, LIU X D, ZHANG Y,et al..Reflex spatial light modulator based on micromirror array device ［J］. Journal of Zhejiang University, 2008, 42(10): 1735-1738. (in Chinese)
[4] KIM M, PARK J H, JEON J A, et al..High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes ［J］. J. Micromech. Microeng, 2009, 19: 035014.
[5] WU M C, LIN H Y, FANG W. Design of novel sequential engagement vertical comb electrodes for analog micromirror ［J］. IEEE Photonics Technology Letters, 2007,19(20): 1586-1588.
[6] ZHANG Y, PAN WU. Design and analysis of a MEMS horizontal torsion micro mirror with folded springs ［J］. Opt.Precision Eng., 2005, 13(supp): 81-85. (in Chinese)
[7] LI S H, LIU Y F, GAO X, et al.. Analysis and fabrication of torsion micromirror actuators based on a MEMS technology ［J］. Chinese Journal of Semiconductors, 2006,27(4): 756-760. (in Chinese)
[8] GREYWALL D S, PAI C S, OH S H, et al.. Monolithic fringe-field-activated crystalline silicon tilting-mirror devices ［J］. Journal of Microelectromechanical Systems, 2003,12(5): 702-706.
[9] WILLIAM P T, JOHN D B, AMY B O, et al.. A high fill factor linear mirror array for a wavelength selective switch ［J］. J. Micromech. Microeng, 2004,14: 147-152
[10] YAMASHITA S, MITA M, FUJITA H, et al.. Optical beam shaping by spatial light phase modulator with bidirectional tilt-piston micro-mirror array ［C］.OSA/CLEO/QELS 2008: 1-2.
[11] SAWADA R, YAMAGUCHI J, HIGURASHI E, et al.. Single Si crystal 1024ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch ［C］. Proceedings of 2002 IEEE/LEOS Optical MEMS, Lugano, Switzerland, 2002: 11–12.
[12] TSAI J, WU M C. Gimbal-Less MEMS two-axis optical scanner array with high fill-factor ［J］. Journal of Microelectromechanical Systems, 2005,14(6): 1323-1328.
[13] BAO M H. Analysis and Design Principles of MEMS Devices ［M］. Elsevier, 2005.
[14] DEGANI O, SOCHER E, LIPSON A, et al.. Pull-In study of an electrostatic torsion microactuator ［J］. Journal of Microelectromechanical Systems,1998,7(4): 373-379.
[15] ZHANG X M, CHAU F S, QUAN C, et al.. A study of the static characteristics of a torsional micromirror ［J］. Sensors and Actuators A, 2001,90: 73-81.
