Fig. 1. Experimental setup of the all-solid-state 266 nm DUV laser

Fig. 2. Output power of 266 nm DUV laser under different green light injection powers varies with the temperature of the crystal heater at different phase matching temperatures. (a) 60 ℃; (b) 120 ℃; (c) 180 ℃; (d) temperature offset ΔT of the crystal heater varies with the input power of 532 nm laser at different phase matching temperatures of the crystal

Fig. 3. Experimental results. (a) Beam quality and (b) power stability of the DUV 266 nm laser when phase matching temperature of the crystal is 60 ℃; (c) beam quality and (d) power stability of the DUV 266 nm laser when phase matching temperature of the crystal is 180 ℃

Fig. 4. Output characteristics of the DUV 266 nm laser. (a) Spectral width; (b) pulse width

Fig. 5. (a) Nonlinear absorption coefficient β_NLA and (b) normalized color center density varies with the power of 266 nm DUV laser at different phase matching temperatures

Table 1. Temperature offset ΔT of the crystal heater at different phase matching temperatures of the crystal