Fig. 1. Computer simulation of refractive index distribution curve based on measured data
Fig. 2. Schematic diagram of the main process flow
Fig. 3. Schematic diagram of ion-diffusion into glass through openings
Fig. 4. Cross section of ion-exchange area of typed C01 microlens array and imaging of letter "A"
Fig. 5. Cross section of ion-exchange area of typed C02 microlens array and imaging of letter "A"
Fig. 6. Average ion-diffusion rate of GRIN planar microlens array
Fig. 7. Average ion-diffusion rate of the typed C01 and typed C02 plane microlens array in the z-direction and r-direction
Fig. 8. Schematic diagram of test principle
Fig. 9. The focal length vs. time diagram GRIN planar microlens array
Fig. 10. Imaging of quadrille paper from GRIN planar microlens array
Number | Hole radius/mm | Center distance/mm |
---|
C01 | 0.25 | 1.60 | C02 | 0.15 | 0.96 |
|
Table 1. The geometric structure parameters of the two mask template patterns
Time/h | 8 | 10 | 12 | 14 | 16 | 18 |
---|
w1/mm | 0.787 | 0.820 | 0.873 | 0.915 | 0.952 | 0.971 | h1/mm | 0.192 | 0.219 | 0.243 | 0.255 | 0.269 | 0.300 | w1/h1 | 4.099 | 3.744 | 3.593 | 3.588 | 3.539 | 3.237 |
|
Table 2. Ion-exchange width and depth ratio of typed C01 microlens array
Time/h | 3 | 4 | 5 | 6 | 7 | 8 |
---|
w2/mm | 0.450 | 0.481 | 0.517 | 0.554 | 0.578 | 0.617 | h2/mm | 0.105 | 0.131 | 0.150 | 0.166 | 0.186 | 0.211 | w2/h2 | 4.286 | 3.672 | 3.447 | 3.337 | 3.108 | 2.924 |
|
Table 3. Ion-exchange width and depth ratio of typed C02 microlens array
Time/h | 8 | 10 | 12 | 14 | 16 | 18 |
---|
NA | 0.255 | 0.279 | 0.278 | 0.316 | 0.348 | 0.387 | Distortion | -0.172 | -0.087 | -0.082 | -0.083 | -0.064 | -0.104 |
|
Table 4. Numerical aperture and distortion of typed C01 microlens array
Time/h | 3 | 4 | 5 | 6 | 7 | 8 |
---|
NA | 0.289 | 0.331 | 0.383 | 0.394 | 0.409 | 0.412 | Distortion | -0.181 | -0.146 | -0.135 | -0.138 | -0.122 | -0.095 |
|
Table 5. Numerical aperture and distortion of typed C02 microlens array