Contents
2022
Volume: 42 Issue 1
14 Article(s)

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[in Chinese], and [in Chinese]
Optoelectronic Technology
  • Publication Date: Mar. 28, 2022
  • Vol. 42, Issue 1, 6 (2022)
Research and Trial-Manufacture
Research and Improvement Analysis on the Defects of Photomask Diffraction Mura
Wen LI, Bing XU, Qilong XIONG, and Zhijun XU
Lithography process is the most important part of mask manufacturing processes. Diffraction mura, as a common defect in lithography process, seriously affects the quality of customer products. Based on the generation mechanism of diffraction mura, the improvement measures are put forward from the aspects of graphic des
Optoelectronic Technology
  • Publication Date: Mar. 28, 2022
  • Vol. 42, Issue 1, 22 (2022)
Analysis and Improvement of Stripe Mura in TFT‑LCD
Zhenglin ZHANG, Shuhui CAO, Yan WANG, Chen LYU, and Zhenyu FENG
Optoelectronic Technology
  • Publication Date: Mar. 28, 2022
  • Vol. 42, Issue 1, 47 (2022)
Study Report