Study on a MEMS silicon-based non-silicon mirror for an optical switch

Yuan Luo; Hongqiao Fu; Shanglian Huang

Journals >Chinese Optics Letters >Volume 1 >Issue 10 >Page 10616 > Article

Chinese Optics Letters
Vol. 1, Issue 10, 10616 (2003)

Study on a MEMS silicon-based non-silicon mirror for an optical switch

Yuan Luo^*, Hongqiao Fu, and Shanglian Huang

Author Affiliations

Institute of Optics and Electronics, Chongqing University, Chongqing 400044

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Yuan Luo, Hongqiao Fu, Shanglian Huang. Study on a MEMS silicon-based non-silicon mirror for an optical switch[J]. Chinese Optics Letters, 2003, 1(10): 10616 Copy Citation Text

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Abstract

A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.

Keywords

230.4040 230.0230 mirrors optical devices

Yuan Luo, Hongqiao Fu, Shanglian Huang. Study on a MEMS silicon-based non-silicon mirror for an optical switch[J]. Chinese Optics Letters, 2003, 1(10): 10616

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