The 3D micro-structures have important application value in the fields of optical trap, stealth and light field regulation, ultra-high pressure sealing and artificial biological materials.Advanced manufacturing methods for 3D micro-structures, including laser direct writing, photolithography, electronic and chemical etching, are rapidly developing. The detectors of Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), laser confocal microscopy, and low-coherence interference microscope are used, but these instruments are monopolized by foreign countries. This paper describes the research progress in low-coherence interference microscopy in China, including the optical design method of interference microscope, the assembly process, the wide-spectrum low-coherence interferogram processing and the micro-structure restoration method, and the evaluation of the uncertainty is given. The results show that the combined uncertainty of 3D morphology of the instrument is 0.9 nm and the maximum micro-structure axial resolution is 0.13 nm.