The optical property, structure, surface properties (roughness and defect density) and laser-induced damage threshold (LIDT) of TiO2 films deposited by electronic beam (EB) evaporation of TiO2 (rutile), TiO2 (anatase) and TiO2+Ta2O5 composite materials are comparatively studied. All films show the polycrystalline anatase TiO2 structure. The loose sintering state and phase transformation during evaporating TiO2 anatase slice lead to the high surface defect density, roughness and extinction coefficient, and low LIDT of films. The TiO2+Ta2O5 composite films have the lowest extinction coefficient and the highest LIDT among all samples investigated. Guidance of selecting materials for high LIDT laser mirrors is given.