Electro-optic (EO) effect and thermo-optic (TO) effect are jointly considered on the basis of field-induced and temperature-affected perturbations of the operating point in waveguide components. TO coefficients of EO fluorinated polyimide films with side-chain azobenzene chromophore were measured by attenuated-total-reflection (ATR) technique at different temperatures with TE- and TM-polarized lights, respectively. It is found that the absolute values of TO coefficients increase with the increments of both chromophore concentration and film thickness, but the polarization dependence of TO coefficients increases with the increment of chromophore concentration and decreases with the increment of film thickness.