The combination of flexure and PZT actuator is a significant method to achieve precision adjustment. A precision adjusting mechanism with flexure hinges was introduced and theoretical calculations were carried out to get the working principle of it. The optimization design and finite element analysis were also taken to acquire the axial stiffness of a typical opto-mechanic structure. The results show that the maximum axial displacement of the optics can be bigger than 200 μm under the yield limit of the material. Secondly, a modal analysis is taken to obtain the natural frequency of the mechanism. The results indicated that the first resonant frequency of the structure is 185.1 Hz. It can be seen that the natural frequency can satisfy the work specification of the lithographic lens. At last, the influence of the applied force of the PZT to the surface figure of an optical element was obtained. The result shows that the influence of the force F=14N to the RMS of the optic element is 4.41 nm. All these results provide useful evidences for the applyment of this mechanism for optic adjusting.