• Chinese Optics Letters
  • Vol. 11, Issue s1, S10204 (2013)
Andreas Pflug, Michael Siemers, Thomas Melzig, Daniel Rademacher, Tobias Zickenrott, and Michael Vergohl
DOI: 10.3788/col201311.s10204 Cite this Article Set citation alerts
Andreas Pflug, Michael Siemers, Thomas Melzig, Daniel Rademacher, Tobias Zickenrott, Michael Vergohl. Numerical shaper optimization for sputtered optical precision f ilters[J]. Chinese Optics Letters, 2013, 11(s1): S10204 Copy Citation Text show less

Abstract

A novel optimization procedure for optical precision sputter coaters with respect to the film homogeneity is demonstrated. For a coater concept based on dual cylindrical sputtering sources and a rotating turn-table as sample-holder, the inherent radial decay of the film thickness must be compensated by shaper elements. For that purpose, a simulation model of the particle flux within such a coater is set up and validated against experimental data. Subsequently, the shaper design is optimized according to the modeled metal flux profile. The resulting film thickness deviations are minimized down to ±0.35%.
Andreas Pflug, Michael Siemers, Thomas Melzig, Daniel Rademacher, Tobias Zickenrott, Michael Vergohl. Numerical shaper optimization for sputtered optical precision f ilters[J]. Chinese Optics Letters, 2013, 11(s1): S10204
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