• Chinese Optics Letters
  • Vol. 10, Issue 11, 112202 (2012)
Ziming Meng, Xiaolan Zhong, Chen Wang, and Zhiyuan Li
DOI: 10.3788/col201210.112202 Cite this Article Set citation alerts
Ziming Meng, Xiaolan Zhong, Chen Wang, Zhiyuan Li. Fabrication of air-bridged Kerr nonlinear polymer photonic crystal slab structures in near-infrared region[J]. Chinese Optics Letters, 2012, 10(11): 112202 Copy Citation Text show less

Abstract

Fabrication details of air-bridged Kerr nonlinear polymer photonic crystal slab structures are presented. Both the two-dimensional photonic crystal slab and the one-dimensional nanobeam structures are fabricated using direct focused ion beam etching and subsequent wet chemical etching. The scanning electron microscopy images show the uniformity and homogeneity of the cylindrical air holes. The optical measurement in the near-infrared region is implemented using the tapered fiber coupling method, and the results agree with the numerical calculations by using the three-dimensional finite-difference time-domain method.
Ziming Meng, Xiaolan Zhong, Chen Wang, Zhiyuan Li. Fabrication of air-bridged Kerr nonlinear polymer photonic crystal slab structures in near-infrared region[J]. Chinese Optics Letters, 2012, 10(11): 112202
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