• Acta Photonica Sinica
  • Vol. 44, Issue 5, 531001 (2015)
JI Bei*, HUANG Shui-ping, and ZHOU Jun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/gzxb20154405.0531001 Cite this Article
    JI Bei, HUANG Shui-ping, ZHOU Jun. Determination of Optical Constants and Thickness of Online Low-E Glass in Visible-near Infrared Region by Ellipsometry[J]. Acta Photonica Sinica, 2015, 44(5): 531001 Copy Citation Text show less

    Abstract

    Based on the optical mechanism of online Low-E glass,the optical constants of functional layer and transition layer of online Low-E glass in visible-near infrared region were analyzed by the spectroscopic ellipsometry.The ellipsometric data of the sample at three different angles of incidence were measured at first,then the Lorentz two-oscillator model and Cauchy model were used to characterize the dispersion characteristics of functional layer and transition layer of online Low-E glass ,respectively.The optical constants and the thickness of each layer of online Low-E glass were obtained by fitting the measured ellipsometric data.Moreover,the Scanning Electron Microscope (SEM) were used to investigate the film thickness of the sample.The fitting results suggest that Lorentz two-oscillator model and Cauchy model can explain the optical properties of online Low-E glass well.Meanwhile,the ellipsometry also provides a reliable method for the determination of optical constants and thickness of the multilayer film systems.
    JI Bei, HUANG Shui-ping, ZHOU Jun. Determination of Optical Constants and Thickness of Online Low-E Glass in Visible-near Infrared Region by Ellipsometry[J]. Acta Photonica Sinica, 2015, 44(5): 531001
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