• Acta Photonica Sinica
  • Vol. 46, Issue 1, 123001 (2017)
LU Sen*, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, and HU Chu-xiong
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/gzxb20174601.0123001 Cite this Article
    LU Sen, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, HU Chu-xiong. Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography[J]. Acta Photonica Sinica, 2017, 46(1): 123001 Copy Citation Text show less

    Abstract

    The intensity of a fixed point in the interference fringes is closely related to the phase change of interference fringes. According to this principle, a real-time phase locking system was established by the analysis of the intensity field. The intensity voltage of a fixed point in the interference fringes was detected as a feedback signal by a photodetector, and an acoustic optical modulator was used to shift the frenquency of the Gaussian beam in real time. By setting intensity voltage to a fixed value, phase locking function was realized. Theoretical model of fringe phase locking system was derivated and verified by experiment. A phase locking controller was also designed based on the model. The experiment results illustrate that, the phase drift is within ±0.04 period under the 400 Hz control frequency, which satisfies the exposure requirements of interference lithography.
    LU Sen, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, HU Chu-xiong. Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography[J]. Acta Photonica Sinica, 2017, 46(1): 123001
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