• Chinese Optics Letters
  • Vol. 11, Issue 10, 102601 (2013)
Yidong Tan, ZhaoLi Zeng, ShuLian Zhang, Peng Zhang, and Hao Chen
DOI: 10.3788/col201311.102601 Cite this Article Set citation alerts
Yidong Tan, ZhaoLi Zeng, ShuLian Zhang, Peng Zhang, Hao Chen. Method for in situ calibration of multiple feedback interferometers[J]. Chinese Optics Letters, 2013, 11(10): 102601 Copy Citation Text show less

Abstract

A method is presented for in situ resolution calibration of multiple feedback interferometers (MFIs) using two lasers with different feedback levels simultaneously. The laser with weak optical feedback level generates half-wavelength optical fringes, whereas the laser with strong multiple feedback level generates optical nano-fringes. By using this method, the number of displaced optical nano-fringes can be easily counted, and the resolution of the MFIs can be accurately determined. The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.
Yidong Tan, ZhaoLi Zeng, ShuLian Zhang, Peng Zhang, Hao Chen. Method for in situ calibration of multiple feedback interferometers[J]. Chinese Optics Letters, 2013, 11(10): 102601
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