• Acta Photonica Sinica
  • Vol. 38, Issue 8, 1937 (2009)
WU Lei-xue1、2、*, WANG Tao1, WANG Jing-wei1、2, LI Xiao-ting3, JING Zheng2、4, YIN Fei1、2, and MEI Shu-gang1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: Cite this Article
    WU Lei-xue, WANG Tao, WANG Jing-wei, LI Xiao-ting, JING Zheng, YIN Fei, MEI Shu-gang. Effect of the LP-MOCVD Growth Parameters For Type-Ⅱ InAs/GaSb Superlattices Surface Morphology[J]. Acta Photonica Sinica, 2009, 38(8): 1937 Copy Citation Text show less

    Abstract

    Type-Ⅱ InAs/GaSb superlattices materials were grown on (100) GaSb substrate in a horizontal quartz reactor by a home-made low pressure metal organic chemical vapor deposition (LP-MOCVD).Growth surface structures and morphologies were characterized by means of double crystal X-ray diffraction (DCXRD),atomic force microscopy (AFM) and photo-luminescence (PL).High quality mirror-like surfaces type-Ⅱ InAs/GaSb superlattices materials were obtained.Photoluminescence results show that the peak wavelength of the type-Ⅱ InAs/GaSb superlattices at 77 K is 3.25 μm.The effects of growth temperature,buffer layer and interfacial layer for surface morphology were discussed.The condition that growth temperature in 500 ℃~520 ℃,without buffer layer and InAsSb interfacial layer can improve the surface morphology of the material.
    WU Lei-xue, WANG Tao, WANG Jing-wei, LI Xiao-ting, JING Zheng, YIN Fei, MEI Shu-gang. Effect of the LP-MOCVD Growth Parameters For Type-Ⅱ InAs/GaSb Superlattices Surface Morphology[J]. Acta Photonica Sinica, 2009, 38(8): 1937
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