• Optoelectronics Letters
  • Vol. 15, Issue 3, 190 (2019)
Jue WANG1, Qing TAO1、2, Chen HU1, Zhong-sheng ZHAI1、2, Jian CHENG1, and Dun LIU1、*
Author Affiliations
  • 1School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
  • 2Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China1
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    DOI: 10.1007/s11801-019-8180-8 Cite this Article
    WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. Optoelectronics Letters, 2019, 15(3): 190 Copy Citation Text show less

    Abstract

    We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.
    WANG Jue, TAO Qing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. Optoelectronics Letters, 2019, 15(3): 190
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