TiO2 chiral sculptured thin films (CSTFs) prepared using glancing angle deposition (GLAD) method based on electron beam evaporation are studied. The relationship between structural parameters and circular Bragg phenomenon (CBP) is investigated. Results demonstrate that, the central wavelength of Bragg regime red-shifts with the increasing pitch of helix, and peak value of selective transmittance will increase after adding more turns to the helix. After annealing, the central wavelength blue-shifts and the peak value rises. Tuning CBP by modulating the deposition parameters and annealing can optimize the performance of circularly polarized devices fabricated from CSTFs.