• Chinese Optics Letters
  • Vol. 7, Issue 11, 1041 (2009)
Jingtao Zhou, Huajun Shen, Huihui Zhang, and Xinyu Liu
Author Affiliations
  • Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
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    DOI: 10.3788/COL20090711.1041 Cite this Article Set citation alerts
    Jingtao Zhou, Huajun Shen, Huihui Zhang, Xinyu Liu. Design and fabrication of a compact multimode interference splitter with silicon photonic nanowires[J]. Chinese Optics Letters, 2009, 7(11): 1041 Copy Citation Text show less

    Abstract

    A compact multimode interference (MMI) splitter with silicon photonic nanowires on silicon-on-insulator (SOI) substrate is designed and fabricated. The footprint of the MMI section is only approximately 3×10 (\mu m). The simulation results show that the device may have a low excess loss of 0.04 dB. The transmission loss of the silicon photonics wire is measured to be 0.73±0.3 dB/mm. The compact size and low transmission loss allow the device to be used in ultra-compact photonic integrated circuits. The device exhibits a good light splitting function. In a spectral range of 1549–1560 nm, the excess loss is 1.5 dB and the average imbalance between the two channels is 0.51 dB.
    Jingtao Zhou, Huajun Shen, Huihui Zhang, Xinyu Liu. Design and fabrication of a compact multimode interference splitter with silicon photonic nanowires[J]. Chinese Optics Letters, 2009, 7(11): 1041
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