• Frontiers of Optoelectronics
  • Vol. 2, Issue 3, 304 (2009)
Yao CHEN1、2, Zhengyu LI1、2, Huaxiang YI2, Zhiping ZHOU2、3、4、*, and Jun YU1
Author Affiliations
  • 1Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
  • 3State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing 100871, China
  • 4School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA
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    DOI: 10.1007/s12200-009-0047-3 Cite this Article
    Yao CHEN, Zhengyu LI, Huaxiang YI, Zhiping ZHOU, Jun YU. Microring resonator for glucose sensing applications[J]. Frontiers of Optoelectronics, 2009, 2(3): 304 Copy Citation Text show less

    Abstract

    Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10-3 refractive index unit (RIU) was obtained.
    Yao CHEN, Zhengyu LI, Huaxiang YI, Zhiping ZHOU, Jun YU. Microring resonator for glucose sensing applications[J]. Frontiers of Optoelectronics, 2009, 2(3): 304
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