• Optoelectronics Letters
  • Vol. 10, Issue 3, 188 (2014)
Xin LI1, Shi-liang GUO2, Zhi-quan LI2, and Ming YANG1、*
Author Affiliations
  • 1Control and Simulation Center, Harbin Institute of Technology, Harbin 150080, China
  • 2Institute of Electrical Engineering, Yanshan University, Qinhuangdao 066004, China
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    DOI: 10.1007/s11801-014-4010-1 Cite this Article
    LI Xin, GUO Shi-liang, LI Zhi-quan, YANG Ming. Study of a novel pressure sensor based on optical microring resonator[J]. Optoelectronics Letters, 2014, 10(3): 188 Copy Citation Text show less

    Abstract

    We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam. The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides. The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0—300 kPa. The thickness of the fixed beam is an important factor which impacts the sensitivity of the system. This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.
    LI Xin, GUO Shi-liang, LI Zhi-quan, YANG Ming. Study of a novel pressure sensor based on optical microring resonator[J]. Optoelectronics Letters, 2014, 10(3): 188
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