Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral photoinhibition lithography (Erratum)

Dazhao Zhu; Liang Xu; Chenliang Ding; Zhenyao Yang; Yiwei Qiu; Chun Cao; Hongyang He; Jiawei Chen; Mengbo Tang; Lanxin Zhan; Xiaoyi Zhang; Qiuyuan Sun; Chengpeng Ma; Zhen Wei; Wenjie Liu; Xiang Fu; Cuifang Kuang; Haifeng Li; Xu Liu

doi:10.1117/1.AP.5.5.059801

Journals >Advanced Photonics >Volume 5 >Issue 5 >Page 059801 > Article

Advanced Photonics
Vol. 5, Issue 5, 059801 (2023)

Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral photoinhibition lithography (Erratum)

Dazhao Zhu¹, Liang Xu², Chenliang Ding¹, Zhenyao Yang¹, Yiwei Qiu¹, Chun Cao¹, Hongyang He³, Jiawei Chen³, Mengbo Tang¹, Lanxin Zhan¹, Xiaoyi Zhang¹, Qiuyuan Sun¹, Chengpeng Ma¹, Zhen Wei¹, Wenjie Liu^1、2, Xiang Fu⁴, Cuifang Kuang^1、2, Haifeng Li^1、2, and Xu Liu^1、2

Author Affiliations

¹Zhejiang Lab, Research Center for Intelligent Chips and Devices, Hangzhou, China

²Zhejiang University, College of Optical Science and Engineering, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China

³Zhejiang University, College of Control Science and Engineering, State Key Laboratory of Industrial Control Technology, Hangzhou, China

⁴Zhejiang Lab, Research Center for Humanoid Sensing, Hangzhou, China

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DOI: 10.1117/1.AP.5.5.059801 Cite this Article Set citation alerts

Dazhao Zhu, Liang Xu, Chenliang Ding, Zhenyao Yang, Yiwei Qiu, Chun Cao, Hongyang He, Jiawei Chen, Mengbo Tang, Lanxin Zhan, Xiaoyi Zhang, Qiuyuan Sun, Chengpeng Ma, Zhen Wei, Wenjie Liu, Xiang Fu, Cuifang Kuang, Haifeng Li, Xu Liu. Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral photoinhibition lithography (Erratum)[J]. Advanced Photonics, 2023, 5(5): 059801 Copy Citation Text

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Abstract

The erratum lists corrections to the published article.

This article [Adv. Photon.4(6), 066002 (2022) doi: 10.1117/1.AP.4.6.066002 was originally published on 23 November 2022 with some minor errors.

No reported results were affected by the errors. The article was corrected and republished on 22 September 2023.

References