• Chinese Optics Letters
  • Vol. 5, Issue 9, 501 (2007)
Y. Benachour* and N. Paraire
Author Affiliations
  • C.N.R.S., Universite Paris-Sud 11, Institut d'Electronique Fondamentale, Bat. 220-91405, Orsay Cedex, France
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    Y. Benachour, N. Paraire. Characterization of planar photonic crystals using surface coupling techniques at large wavelengths[J]. Chinese Optics Letters, 2007, 5(9): 501 Copy Citation Text show less

    Abstract

    We report a non-destructive characterization of planar two-dimensional (2D) photonic crystals (PhCs) made in silicon on insulator (SOI) wafers using ellipsometric or Fourier transformed infrared (FTIR) spectroscope. At large wavelengths, devices behave as homogeneous isotropic materials defined by an effective filling factor. The experimental results related to the PhC limited dimensions confirm this characterization.
    Y. Benachour, N. Paraire. Characterization of planar photonic crystals using surface coupling techniques at large wavelengths[J]. Chinese Optics Letters, 2007, 5(9): 501
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