• Chinese Optics Letters
  • Vol. 2, Issue 7, 07426 (2004)
Dongyan Chen*, Bin Lin, and Yuqing Chen
Author Affiliations
  • State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instruments, Zhejiang University, Hangzhou 310027
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    Dongyan Chen, Bin Lin, Yuqing Chen. Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors[J]. Chinese Optics Letters, 2004, 2(7): 07426 Copy Citation Text show less

    Abstract

    In this paper, the fabrication and testing results of a two-dimensional pin-cushion position sensitive detector (PSD) are presented. The obtained pin-cushion PSD with an 8 * 8 mm2 effective area presents a maximum spectral response of 0.5 mA/mW at 850-nm wavelength, a 12-nA dark current at 5-V reverse voltage, a reverse breakdown voltage of 50 V, a nonlinearity of 2.175%, and a spatial resolution of 10 um. The spatial resolution is relatively low and the slight pin-cushion concave distortion is generated due to the incompletely satisfied relationship between sheet resistivity of the anode and the resistance per unit length.
    Dongyan Chen, Bin Lin, Yuqing Chen. Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors[J]. Chinese Optics Letters, 2004, 2(7): 07426
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