• Chinese Optics Letters
  • Vol. 11, Issue 9, 091202 (2013)
Jie Li and Shibin Wu
DOI: 10.3788/col201311.091202 Cite this Article Set citation alerts
Jie Li, Shibin Wu. Fast and accurate measurement of large optical surfaces before polishing using a laser tracker[J]. Chinese Optics Letters, 2013, 11(9): 091202 Copy Citation Text show less

Abstract

We present a method that accurately measures large optical surfaces before polishing using a laser tracker. Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change. We use this method to measure a \Phi 1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 \mu m (root mean square, RMS).
Jie Li, Shibin Wu. Fast and accurate measurement of large optical surfaces before polishing using a laser tracker[J]. Chinese Optics Letters, 2013, 11(9): 091202
Download Citation