• Acta Photonica Sinica
  • Vol. 31, Issue 3, 293 (2002)
[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese]. GROWTH KINETIC OF SiGe/Si PHOTOCHEMICAL VAPOR DEPOSITION[J]. Acta Photonica Sinica, 2002, 31(3): 293 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese]. GROWTH KINETIC OF SiGe/Si PHOTOCHEMICAL VAPOR DEPOSITION[J]. Acta Photonica Sinica, 2002, 31(3): 293
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