• Chinese Optics Letters
  • Vol. 11, Issue 7, 071201 (2013)
Chao Qiu, Xiaogang Sun, and Meisheng Luan
DOI: 10.3788/col201311.071201 Cite this Article Set citation alerts
Chao Qiu, Xiaogang Sun, Meisheng Luan. Determining polymer film thickness during manufacturing with broadband transmission[J]. Chinese Optics Letters, 2013, 11(7): 071201 Copy Citation Text show less

Abstract

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert–Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 \mu m for polymer films with less than 100-\mm m thickness.
Chao Qiu, Xiaogang Sun, Meisheng Luan. Determining polymer film thickness during manufacturing with broadband transmission[J]. Chinese Optics Letters, 2013, 11(7): 071201
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