• Chinese Optics Letters
  • Vol. 10, Issue s2, S21407 (2012)
Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, and S. H. Jeong
DOI: 10.3788/col201210.s21407 Cite this Article Set citation alerts
Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, S. H. Jeong. Novel optical f iber-based laser direct writing process for micromachining of metal[J]. Chinese Optics Letters, 2012, 10(s2): S21407 Copy Citation Text show less

Abstract

A laser micromachining technique for the fabrication of metallic microstructures is proposed. The fabrication of microstructures is done by laser-induced wet etching that adopts an optical fiber as a machining tool. The laser beam delivered through the multimode fiber directly irradiates on the workpiece while maintaining a proper gap to avoid fiber damage. The manufacture of microstructures with high surface quality and good size uniformity is realized. Microgrooves with aspect ratio over 10 and microholes with a nearly straight cross-section can be produced by the proposed technique. The overall etching results are examined closely with respect to process variables.
Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, S. H. Jeong. Novel optical f iber-based laser direct writing process for micromachining of metal[J]. Chinese Optics Letters, 2012, 10(s2): S21407
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