Capacitance voltage dividers are often utilized to monitor voltage values in high power electrical pulse devices. The amplitude linearity of the capacitive voltage divider characterizes the consistency of the monitored voltage value. In this paper, the principle of the dielectric substrate capacitance divider is analyzed, and the performance of the dielectric substrate capacitance divider is simulated under the rectangular pulse high voltage source(500 V~4 kV) with a pulse width of 200 ns and the impact high voltage source(10~100 kV) with a half-width of 10 μs respectively. The design and fabrication are carried out. The results show that the amplitude linearity of the ceramic capacitor voltage divider is good, which is 1.16% within the range of 500 V~100 kV. The voltage divider calibrated under small signals can be applied to the measurement of large signals.