Based on the monitoring data of O3 concentration from 2014 to 2020 and the meteorological data of automatic meteorological station in the same period, the daily and monthly variation rules of O3 concentration on the surface of Hefei, China are studied, and the influence of temperature, humidity, wind speed and other meteorological factors on O3 concentration is analyzed. The results show that O3 concentration in Hefei area has typical unimodal diurnal variation characteristics, which usually reaches the peak at about 15:00 and drops to the lowest daily value at about 07:00. The variation of monthly average of the maximum 8 h moving average of O3 concentration (O3-8h) showsan “M” type, which generally reaches the highest level in June and August, and falls to the lowest level in January and December, the monthly maximum value of O3-8h was 2.8~3.7 times of the minimum value, and the average value was 3.1 times. Affected by meteorological factors, the annual variation rule of O3 concentration is basically the same as that of temperature, but has no obvious relationship with the variation trend of humidity.