• Frontiers of Optoelectronics
  • Vol. 15, Issue 1, 12200 (2022)
Galina Georgieva1、*, Christian Mai2, Pascal M. Seiler1, Anna Peczek3, and Lars Zimmermann1、2
Author Affiliations
  • 1Hochfrequenztechnik-Photonik/Siliziumphotonik, Technische Universitat Berlin, Straβe des 17. Juni 135, 10623 Berlin, Germany
  • 2IHP—Leibnitz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
  • 3IHP Solutions GmbH, Im Technologiepark 7, 15236 Frankfurt (Oder), Germany
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    DOI: 10.1007/s12200-022-00005-8 Cite this Article
    Galina Georgieva, Christian Mai, Pascal M. Seiler, Anna Peczek, Lars Zimmermann. Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line[J]. Frontiers of Optoelectronics, 2022, 15(1): 12200 Copy Citation Text show less

    Abstract

    In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of -5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.
    Galina Georgieva, Christian Mai, Pascal M. Seiler, Anna Peczek, Lars Zimmermann. Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line[J]. Frontiers of Optoelectronics, 2022, 15(1): 12200
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