Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Photonica Sinica >Volume 32 >Issue 8 >Page 973 > Article

Acta Photonica Sinica
Vol. 32, Issue 8, 973 (2003)

Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry[J]. Acta Photonica Sinica, 2003, 32(8): 973 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry[J]. Acta Photonica Sinica, 2003, 32(8): 973

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