• Chinese Optics Letters
  • Vol. 4, Issue 4, 04247 (2006)
Xiaoyong Fu1、2, Sumei Wang1、2, Degang Deng1、2, Kui Yi1, Jianda Shao1, and Zhengxiu Fan1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
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    Xiaoyong Fu, Sumei Wang, Degang Deng, Kui Yi, Jianda Shao, Zhengxiu Fan. ZrO2 films with variable refractive index by glancing angle deposition[J]. Chinese Optics Letters, 2006, 4(4): 04247 Copy Citation Text show less

    Abstract

    When optical film is deposited at oblique angle incidences, the film becomes porously, and the film effective refractive index will decrease. Six porous ZrO2 films are fabricated by the glancing angle deposition (GLAD) technique with the different incidence angles. By changing the substrate tilt angle from 0 to 85 degrees, the film refractive index varies from 1.92 to 1.27.
    Xiaoyong Fu, Sumei Wang, Degang Deng, Kui Yi, Jianda Shao, Zhengxiu Fan. ZrO2 films with variable refractive index by glancing angle deposition[J]. Chinese Optics Letters, 2006, 4(4): 04247
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