Optical Fiber Pressure Sensor Based on Sapphire Wafers Processed by Femtosecond Laser

Yi Jiang; Yutong Zhang; Hui Deng

doi:10.3788/AOS230732

[1] Javed Y, Mansoor M, Shah I A. A review of principles of MEMS pressure sensing with its aerospace applications[J]. Sensor Review, 39, 652-664(2019).

[2] Yang J E. A harsh environment wireless pressure sensing solution utilizing high temperature electronics[J]. Sensors, 13, 2719-2734(2013).

[3] Liu T G, Wang S, Jiang J F et al. Advances in optical fiber sensing technology for aviation and aerospace application[J]. Chinese Journal of Scientific Instrument, 35, 1681-1692(2014).

[4] Chen J L, Kong D M, Hao H et al. A new type of optical fiber sensor for multi-phase detection in petroleum production[J]. Acta Metrologica Sinica, 43, 1036-1043(2022).

[5] Yao Z, Liang T, Jia P G et al. A high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit[J]. Sensors, 16, 913(2016).

[6] Li C A, Cordovilla F, Jagdheesh R et al. Design optimization and fabrication of a novel structural SOI piezoresistive pressure sensor with high accuracy[J]. Sensors, 18, 439(2018).

[7] Li C, Sun B S, Jia P Y et al. Capacitive pressure sensor with integrated signal-conversion circuit for high-temperature applications[J]. IEEE Access, 8, 212787-212793(2020).

[8] Ren J A, Ward M, Kinnell P et al. Plastic deformation of micromachined silicon diaphragms with a sealed cavity at high temperatures[J]. Sensors, 16, 204(2016).

[9] Cui Y, Jiang Y, Liu T M et al. A dual-cavity Fabry-Perot interferometric fiber-optic sensor for the simultaneous measurement of high-temperature and high-gas-pressure[J]. IEEE Access, 8, 80582-80587(2020).

[10] Zhang S, Jiang Y. Optical fiber high-temperature pressure sensor[J]. Instrument Technique and Sensor, 10-12, 70(2018).

[11] Liao C R, He J, Wang Y P. Study on high temperature sensors based on fiber Bragg gratings fabricated by femtosecond laser[J]. Acta Optica Sinica, 38, 0308009(2018).

[12] Zhang Z, He J, Dong Q et al. Diaphragm-free gas-pressure sensor probe based on hollow-core photonic bandgap fiber[J]. Optics Letters, 43, 3017-3020(2018).

[13] Xu B, Wang C, Wang D N et al. Fiber-tip gas pressure sensor based on dual capillaries[J]. Optics Express, 23, 23484-23492(2015).

[14] Ma W Y, Jiang Y, Gao H C. Miniature all-fiber extrinsic Fabry–Pérot interferometric sensor for high-pressure sensing under high-temperature conditions[J]. Measurement Science and Technology, 30, 025104(2019).

[15] Jiang Y G, Li J A, Zhou Z W et al. Fabrication of all-SiC fiber-optic pressure sensors for high-temperature applications[J]. Sensors, 16, 1660(2016).

[16] Cui Y, Jiang Y, Zhang Y T et al. Sapphire optical fiber high-temperature vibration sensor[J]. Optics Express, 30, 1056-1065(2022).

[17] Mills D A, Alexander D, Subhash G et al. Development of a sapphire optical pressure sensor for high-temperature applications[J]. Proceedings of SPIE, 9113, 91130H(2014).

[18] Yi J, Lally E, Wang A B et al. Demonstration of an all-sapphire Fabry-Pérot cavity for pressure sensing[J]. IEEE Photonics Technology Letters, 23, 9-11(2011).

[19] Yi J. Sapphire Fabry-Pérot pressure sensor at high temperature[J]. IEEE Sensors Journal, 21, 1596-1602(2021).

[20] Shao Z Q, Wu Y L, Wang S et al. All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching[J]. Optics Express, 29, 4139-4146(2021).

[21] Jiang Y. High-resolution interrogation technique for fiber optic extrinsic Fabry-Perot interferometric sensors by the peak-to-peak method[J]. Applied Optics, 47, 925-932(2008).

[22] Jiang Y. Fourier transform white-light interferometry for the measurement of fiber-optic extrinsic Fabry-Pérot interferometric sensors[J]. IEEE Photonics Technology Letters, 20, 75-77(2008).