Yi Jiang, Yutong Zhang, Hui Deng. Optical Fiber Pressure Sensor Based on Sapphire Wafers Processed by Femtosecond Laser[J]. Acta Optica Sinica, 2023, 43(15): 1506001
- Acta Optica Sinica
- Vol. 43, Issue 15, 1506001 (2023)
Fig. 1. Schematic diagram of sensor head
Fig. 2. Sensor fabrication. (a) Sapphire wafer processed by femtosecond laser; (b) micrograph of cutting edge
Fig. 3. Bonded sensor. (a) Sapphire pressure probe; (b) sensor package
Fig. 4. Signal demodulation process. (a) Reflection spectrum of sensor; (b) frequency spectrum (solid line) and Gaussian windows (short dashed line and long dashed line); (c) temperature cavity signal after inverse Fourier transform; (d) pressure cavity signal after inverse Fourier transform
Fig. 5. Pressure response of 0-30 MPa
Fig. 6. Test system for pressure response at high temperature
Fig. 7. Pressure response at high temperature. (a) Pressure test within range of 25-700 ℃; (b) sensitivity changes with temperature; (c) three-dimensional diagram of cavity length, temperature, and pressure
Fig. 8. Temperature response
Fig. 9. Fluctuation of optical cavity length at 10 MPa pressure
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