• Photonics Research
  • Vol. 12, Issue 5, 921 (2024)
Yisi Dong1、2, Wenwen Li1、2, Jinran Zhang1、2, Wenrui Luo1、2, Haijin Fu1、2、4、*, Xu Xing1、2、5、*, Pengcheng Hu1、2, Yongkang Dong3, and Jiubin Tan1、2
Author Affiliations
  • 1Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
  • 2Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
  • 3National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China
  • 4e-mail: haijinfu@hit.edu.cn
  • 5e-mail: Xingxu@hit.edu.cn
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    DOI: 10.1364/PRJ.513576 Cite this Article Set citation alerts
    Yisi Dong, Wenwen Li, Jinran Zhang, Wenrui Luo, Haijin Fu, Xu Xing, Pengcheng Hu, Yongkang Dong, Jiubin Tan. High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer[J]. Photonics Research, 2024, 12(5): 921 Copy Citation Text show less

    Abstract

    As the key of embedded displacement measurement, a fiber-optic micro-probe laser interferometer (FMI) is of great interest in developing high-end equipment as well as precision metrology. However, conventional phase-generated carrier (PGC) approaches are for low-speed scenes and local error analysis, usually neglecting the global precision analysis and dynamic effect of system parameters under high-speed measurement, thus hindering their broad applications. We present a high-speed PGC demodulation model and method to achieve subnanometer displacement measurement precision in FMI. This model includes a global equivalent resolution analysis and revelation of the demodulation error mechanism. Utilizing this model, the failure issues regarding the PGC demodulation method under high speed and large range are addressed. Furthermore, an ultra-precision PGC demodulation algorithm based on the combination of static and dynamic delay adaptive regulation is proposed to enable high-speed and large-range displacement measurement. In this paper, the proposed model and algorithm are validated through simulation and experimental tests. The results demonstrate a displacement resolution of 0.1 nm with a standard deviation of less than 0.5 nm when measuring at a high velocity of 1.5 m/s—nearly a tenfold increase of the latest study.
    Δφ(t)=(φ(t)u1·Δu1)2+(φ(t)u2·Δu2)2=(u2u12+u22)2Δu12+(u1u12+u22)2Δu22,

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    Δφ(t)=Δu1U1.

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    ΔL=λ4πnΔφ(t)=λ4πn·12N*.

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    N*=SINAD  [dB]1.76  [dB]6.02  [dB].

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    im=(1+mcos(ω0(tτ)+φm))·(A+Bcos(Ccos(ω0(tτ))+φ0(t)))=(1+mcos(ω0tφτ+φm))·(A+Bcos(Ccos(ω0tφτ)+φ0(t))),

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    u1=BJ1(Ccosφτ)J0(Csinφτ)·(1+J2(Csinφτ)/J0(Csinφτ))·sin(φ0(t))+12mAcosΔφmτ+g(ω0),

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    u2=BJ2(Ccosφτ)J0(Csinφτ)·cos(φ0(t))+BJ2(Csinφτ)J0(Ccosφτ)·cos(φ0(t))+h(ω0),

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    φ(t)=arctan(Mm,τ·Mτ1·sin(φ0(t))+Am,τ+g(ω0)Mτ2·cos(φ0(t))+Aτ2+h(ω0)),

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    {Mm,τ=1+J2(Csinφτ)/J0(Csinφτ),Mτ1=BJ1(Ccosφτ)J0(Csinφτ),Mτ2=BJ2(Ccosφτ)J0(Csinφτ),Am,τ=12mAcosΔφmτ,Aτ2=BJ2(Csinφτ)J0(Ccosφτ)·cos(φ0(t)).

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    φd=ω0τd=2πf0·2Lc=f0vφ(t),

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    Yisi Dong, Wenwen Li, Jinran Zhang, Wenrui Luo, Haijin Fu, Xu Xing, Pengcheng Hu, Yongkang Dong, Jiubin Tan. High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer[J]. Photonics Research, 2024, 12(5): 921
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