• Photonics Research
  • Vol. 9, Issue 7, 1255 (2021)
Yiding Lin1、2、5, Danhao Ma3, Kwang Hong Lee2, Rui-Tao Wen4、6, Govindo Syaranamual2, Lionel C. Kimerling3, Chuan Seng Tan1、2、*, and Jurgen Michel2、3、4、7
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
  • 2Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology, Singapore 138602, Singapore
  • 3Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 4Materials Research Laboratories, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 5Current address: Max Planck Institute of Microstructure Physics, Halle (Saale) 06120, Germany
  • 6Current address: Southern University of Science and Technology, Shenzhen 518055, China
  • 7e-mail: jmichel@mit.edu
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    DOI: 10.1364/PRJ.419776 Cite this Article Set citation alerts
    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel, "PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor," Photonics Res. 9, 1255 (2021) Copy Citation Text show less
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    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel, "PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor," Photonics Res. 9, 1255 (2021)
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