• Photonics Research
  • Vol. 9, Issue 7, 1255 (2021)
Yiding Lin1、2、5, Danhao Ma3, Kwang Hong Lee2, Rui-Tao Wen4、6, Govindo Syaranamual2, Lionel C. Kimerling3, Chuan Seng Tan1、2、*, and Jurgen Michel2、3、4、7
Author Affiliations
  • 1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
  • 2Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology, Singapore 138602, Singapore
  • 3Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 4Materials Research Laboratories, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  • 5Current address: Max Planck Institute of Microstructure Physics, Halle (Saale) 06120, Germany
  • 6Current address: Southern University of Science and Technology, Shenzhen 518055, China
  • 7e-mail: jmichel@mit.edu
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    DOI: 10.1364/PRJ.419776 Cite this Article Set citation alerts
    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel, "PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor," Photonics Res. 9, 1255 (2021) Copy Citation Text show less

    Abstract

    Mechanical strain engineering has been promising for many integrated photonic applications. However, for the engineering of a material electronic bandgap, a trade-off exists between the strain uniformity and the integration compatibility with photonic-integrated circuits (PICs). Herein, we adopted a straightforward recess-type design of a silicon nitride (SiNx) stressor to achieve a uniform strain with enhanced magnitude in the material of interest on PICs. Normal-incidence, uniformly 0.56% tensile strained germanium (Ge)-on-insulator (GOI) metal-semiconductor-metal photodiodes were demonstrated, using the recessed stressor with 750 MPa tensile stress. The device exhibits a responsivity of 1.84±0.15 A/W at 1550 nm. The extracted Ge absorption coefficient is enhanced by 3.2× to 8340 cm-1 at 1612 nm and is superior to that of In0.53Ga0.47As up to 1630 nm limited by the measurement spectrum. Compared with the nonrecess strained device, additional absorption coefficient improvement of 10%–20% in the C-band and 40%–60% in the L-band was observed. This work facilitates the recess-strained GOI photodiodes for free-space PIC applications and paves the way for various (e.g., Ge, GeSn or III-V based) uniformly strained photonic devices on PICs.
    (hv)|=A(hvEgΓ-LH+hvEgΓ-HH)/hv,

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    εxx=σxxv·(σyy+σzz)E,(A1)

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    εyy=σyyv·(σxx+σzz)E,(A2)

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    εzz=σzzv·(σxx+σyy)E,(A3)

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    δEhy=a(εxx+εyy+εzz),(A4)

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    δEsh=2b(εxxεzz),(A5)

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    EgLH=EgδEhy14δEsh+12Δ12Δ2+Δ·δEsh+94δEsh2,(A6)

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    EgHH=EgδEhy+12δEsh,(A7)

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    Yiding Lin, Danhao Ma, Kwang Hong Lee, Rui-Tao Wen, Govindo Syaranamual, Lionel C. Kimerling, Chuan Seng Tan, Jurgen Michel, "PIC-integrable, uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor," Photonics Res. 9, 1255 (2021)
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