Zhe Zhang, Qi Song, Kunpeng Zhang, Mei Xue, Yu Hou, Zichen Zhang. Simulation and Experimental Research on Flat Top Femtosecond Laser Grooving of Silicon Wafer[J]. Chinese Journal of Lasers, 2023, 50(20): 2002202
- Chinese Journal of Lasers
- Vol. 50, Issue 20, 2002202 (2023)
Fig. 1. Schematic of one-dimensional silicon irradiated by femtosecond laser pulse
Fig. 2. Variation of electron density on silicon surface under femtosecond pulse irradiation
Fig. 3. Temperature evolution of electron and lattice systems
Fig. 4. Evolution of thermal conductivity of system
Fig. 5. Comparison of multiple scanning process of Gaussian spot and single scanning process of flat top spot. (a) Multiple scanning process of Gaussian spot; (b) single scanning process of flat top spot
Fig. 6. Comparison of flat-top Gaussian distribution functions with different orders
Fig. 7. Ablative crater shapes under different laser pulse numbers. (a) 1 pulse; (b) 5 pulses; (c) 10 pulses
Fig. 8. Ablation crater depth versus laser fluence
Fig. 9. Optical path diagram of flat-top laser grooving experiment
Fig. 10. Spot overlap rate and spot interval during flat top spot scanning
Fig. 11. Groove surface and bottom images at same location
Fig. 12. 2D groove shape test result
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Table 1. Material parameters
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Table 2. Laser related parameters
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