Yanlei SHI, Niefeng SUN, Chengyan XU, Shujie WANG, Peng LIN, Chunlei MA, Senfeng XU, Wei WANG, Chunmei CHEN, Lijie FU, Huimin SHAO, Xiaolan LI, Yang WANG, Jingkai QIN. Thermal Field of 6-inch Indium Phosphide Single Crystal Growth by Semi-sealed Czochralski Method [J]. Journal of Inorganic Materials, 2023, 38(3): 335
- Journal of Inorganic Materials
- Vol. 38, Issue 3, 335 (2023)
1. Schematic of the processes of semi-sealed Czochralski method(a) Seeding and shoulder stage; (b) Diameter-controlling stage; (c) Crystal raised from the melt
2. Thermal field distributions in the seeding stages with different methods(a) SSC method; (b) VCZ method; (c) LEC method
3. Temperature distribution in the melt at the front of the solid-liquid interface(a) Sampling position in the melt; (b) Temperature distribution in the melt at the front of solid-liquid interface; (c) Schematic of heat flow in VCZ method
4. Temperature distribution in the crystal(a) Schematic diagram of the temperature sampling points in the crystal; (b) Temperature distribution in the crystal from the solid-liquid interface to the seed-crystal interface
5. Temperature distribution in the melt, B2O3 and atmosphere around the crystal(a) Location of sampling points; (b) Comparison of temperature distributions by using different methods
6. Digital photographs of 6-inch InP crystal and cutting wafer(a) LEC-grown InP crystal; (b) SSC-grown InP crystal; (c) Cracked cutting wafer of LEC-grown crystal
7. Dislocation densities of crystal tails by LEC and SSC methods(a) Crystal dislocation density by LEC method; (b) Crystal dislocation density by SSC method
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Table 1.
Location, temperature and temperature gradient of each section
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