Fig. 1. Algorithm flow chart

Fig. 2. Original surface shape and simulated stripe pattern. (a) Original surface shape; (b) simulated corresponding interferogram

Fig. 3. Original phases. (a) Binary image; (b) wrapped phase of line 250; (c) unwrapping phase; (d) unwrapped phase of line 250

Fig. 4. Reconstructed phase maps. (a) Reconstructed phase of our method; (b) reconstructed phase of Fourier method

Fig. 5. Figures of impact of single noise on residual. (a) PV corresponding to single noise; (b) RMS corresponding to single noise

Fig. 6. Figures of impact of mixed noise on residual. (a) PV corresponding to mixed noise; (b) RMS corresponding to mixed noise

Fig. 7. Fringe patterns with different tilt coefficients. (a) Tilt coefficient is 5; (b) tilt coefficient is 10; (c) tilt coefficient is 15; (d) tilt coefficient is 20; (e) tilt coefficient is 25; (f) tilt coefficient is 30; (g) tilt coefficient is 35; (h) tilt coefficient is 40; (i) tilt coefficient is 45

Fig. 8. Residual varying with the second Zernike polynomial coefficient. (a) PV varying with the second Zernike polynomial coefficient; (b) RMS varying with the second Zernike polynomial coefficient

Fig. 9. Phase and residual plots measured in experiment. (a) Original interferogram; (b) phase obtained by ZYGO-Verifire PE phase-shifting interferometer; (c) phase obtained by our method; (d) phase residual

Table 1. PV and RMS values of phase and phase error